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Challenges in double patterning, by Apo Sezginer, CTO, Invarium

 Apo Sezginer
  7th-Mar-2007
Views: 2567
Domain: Electronics
Category: Semiconductors
Contents:
Challenges in Double Patterning
February 26, 2007

Index

Introduction DPT Challenges Invarium patterning synthesis for DPT Invarium company background

2

Printing progressively smaller CDs with the same
k1=1.0 k1=0.6 k1=0.5 k1=0.4 k1=0.3

193nm NA = 0.85

250nm

130nm

110nm

90nm

65nm

What hardware can natively deliver Achieved by patterning synthesis software

Acceptable patterning of 65nm ... See more

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