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Changing Inspection Landscape: KLA-Tencor's Voyager 1015 and Surfscan SP7

 Risto Puhakka
  2nd-Aug-2018
Description: KLA-Tencor's Voyager 1015 and Surfscan SP7 provide solutions for advanced nodes in logic and memory as well as EUV transition
Views: 2465
Domain: Electronics
Category: Semiconductors
Contributing Organization: KLA-Tencor
 ‐ More of their Presentations
Contents:
The Chip Insider®

August 2, 2018

Equipment & Emerging Markets
Changing Inspection Landscape: KLA-Tencor’s
Voyager™ 1015 and Surfscan® SP7
• Advanced Node Defect Detection Challenges
• Lithography Cost Increases Demand for Inspection

• Two New Inspectors for Advanced IC Manufacturing
• Voyager 1015
• Surfscan SP7

• New technologies and solutions ... See more
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