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CMOS Fabrication in Deep Submicron Technology

 R. Saleh
  1st-Sep-2007
Views: 3318
Domain: Electronics
Category: Semiconductors
Contents:
EECE481

CMOS Fabrication in Deep Submicron Technology
R. Saleh Dept. of ECE University of British Columbia res@ece.ubc.ca

RAS

EECE481

1

CMOS Has Two Transistor Types
g Look at cross-section s nMOS n+ p n+ to p substrate substrate must be p substrate must be n n+ d pMOS p+ n p+

� CMOS devices require two types of substrate for isolation of transistors � n-type for pMOS ... See more

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