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Cobalt Fab Intro & Integration from CVD to CMP

 L. Gerlich, M. Wislicenus, J. Koch, A. Dhavamani, S. Esmaeili, R. Krause, B. Uhlig
  22nd-Jun-2018
Description: Cobalt Fab Intro & Integration from CVD to CMP.
Views: 2860
Domain: Electronics
Category: Semiconductors
Contributing Organization: CMC Fabs
 ‐ More of their Presentations
Contents:
27.04.2018

Cobalt Fab Intro & Integration
from CVD to CMP (R&D Accelerator)
L. Gerlich, M. Wislicenus, J. Koch, A. Dhavamani, S. Esmaeili,
R. Krause, B. Uhlig

CMC Conference 2018

FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS IPMS
CENTER NANOELECTRONIC TECHNOLOGIES (CNT)
Königsbrücker Straße 178
01099 Dresden
Germany
www.ipms.fraunhofer.de

Outline
Cobalt Integration Solutions ... See more

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