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Digital Mass Flow Controllers: History, Advantages, and Multi-Gas Selection Capabilities

 Advanced Energy
  19th-Sep-2007
Views: 1691
Domain: Electronics
Category: Semiconductors
Contents:
Digital Mass Flow Controllers
History, Advantages, and Multi-Gas Selection Capabilities

For the past quarter of a century, analog mass flow controllers have served as the most effective means of precisely controlling
gas flow in semiconductor processes. MFCs are an essential component of many process tools, but users have generally felt
that analog MFCs have limited flexibility and require an exc ... See more
Advanced Energy
03 July, 2007