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How far can we go with optical litho?

 WeSRCH Poster
  2nd-Mar-2007
Views: 186
Domain: Electronics
Category: Semiconductors
Contents:
How far can we go (with Optical Litho)?
Farhad Moghadam
General Manager, Thin Films Group

Gilad Almogy
General Manager, Process Diagnostics and Control Group
Press Luncheon, San Jose, CA
February 27, 2007

Litho Space Keeps Expanding

Productivity

Defects
Printing

Preparation






Scanner
Track
Mask/Mask Etch
Photoresist

Metrology/Inspection
DFM

2
External Use

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