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How far can we go (with Optical Litho)?, Farhad Moghadam, Applied Materials

 Farhad Moghadam
  13th-Mar-2007
Views: 2461
Domain: Electronics
Category: Semiconductors
Contents:
How far can we go (with Optical Litho)?
Farhad Moghadam
General Manager, Thin Films Group

Gilad Almogy
General Manager, Process Diagnostics and Control Group
Press Luncheon, San Jose, CA February 27, 2007

Litho Space Keeps Expanding

Productivity Printing Preparation
� � � � Scanner Track Mask/Mask Etch Photoresist

Defects

Pattern Transfer

Metr ... See more

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