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In-Situ 4000 White Paper: Solving the problems of pyrometry and thickness measurement during MBE and

 SVT Associates
  11th-Oct-2007
Views: 1641
Domain: Electronics
Category: Semiconductors
Contents:
In-Situ 4000 White Paper
Solving the problems of pyrometry and thickness measurement during MBE and MOCVD.
Background
Pyrometry is a well established measurement technique and is successfully used in many applications. It has one main feature which makes it attractive for substrate temperature measurement during MBE or MOCVD: non-contact, vacuum compatible temperature sensing. However as those who ... See more

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