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Micro-patterned porous silicon using proton beam writing

 M. B. H. Breese, D. Mangaiyarkarasi, E. J. Teo, A. A. Bettiol and D. Blackwood
  9th-Jul-2008
Views: 1726
Domain: Electronics
Category: Semiconductors
Contents:
Micro-patterned porous silicon using proton beam writing
M. B. H. Breese, D. Mangaiyarkarasi, E. J. Teo*, A. A. Bettiol and D. Blackwood*
Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542 *Materials Science and Engineering Department, National University of Singapore, Singapore 117542
Abstract. A high-energy beam of hydrogen or helium ions ... See more

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