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EUV Materials Solution

 Toshi Hishiro
  2nd-Sep-2018
Description: EUV Materials Solution.
Views: 1966
Domain: Electronics
Category: Semiconductors
Contributing Organization: EUV Litho, Inc.
 ‐ More of their Presentations
Contents:
EUV Materials Solution
Yoshi Hishiro
Director, R&D
JSR Micro Inc.
June 14, 2018

Contents
• What is Difference between EUV and ArF?
• EUV Material Development
– Chemically amplified resist(CAR)
– Sensitizer UL
– Metal resist

• EUV Material Production
• Next Generation

2

Contents
• What is Difference between EUV and ArF?
• EUV Material Developmen ... See more

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