Go to Page # Page of 21

EUV Materials Solution

 Toshi Hishiro
  2nd-Sep-2018
Description: EUV Materials Solution.
Views: 1485
Domain: Electronics
Category: Semiconductors
Contributing Organization: EUV Litho, Inc.
 ‐ More of their Presentations
Contents:
EUV Materials Solution
Yoshi Hishiro
Director, R&D
JSR Micro Inc.
June 14, 2018

Contents
• What is Difference between EUV and ArF?
• EUV Material Development
– Chemically amplified resist(CAR)
– Sensitizer UL
– Metal resist

• EUV Material Production
• Next Generation

2

Contents
• What is Difference between EUV and ArF?
• EUV Material Developmen ... See more

Recent Presentations

...
20 September, 2018
Steven Six
19 September, 2018

Micro-Combined Heat & Power Generation

Our energy environment is changing rapidly as Governments globally strive to make cost-efficient use of resources while enabling the emergence of a low carbon economy.

...
18 September, 2018