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Manufacturing Technology Development of Phase Change Memory at ULVAC

 Koukou Suu
Description: Phase Change Memory (PCM) is relatively mature emerging memory technology at ULVAC. Requirements from "smart ICT" can be satisfied by emerging NVMs development in manufacturing technologies.
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Domain: Electronics
Category: Semiconductors
Contributing Organization: ConFab 2018
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Manufacturing Technology Developments
in ULVAC for Phase Change Memory
Apr. 10, 2018

Koukou Suu
Global Market and Technology Strategy Division,
Slide 1
Copyright ©2018, ULVAC, Inc., All rights reserved.

1. Introduction
1. Technology Trend of Computer and Memory
2. Emerging Non-volatile Memories
1. Cell Structure of PCMS
2. What is Chalcogenide Glass?
3. Sputteri ... See more

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