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The Role of Metrology And Inspection In Semiconductor Processing

 Mark Keefer, Rebecca Pinto, Cheri Dennison, James Turlo
  21st-Sep-2017
Description: Metrology and inspection systems can be broadly separated into three main classifications by application: critical dimension (CD) and overlay measurements, particle and pattern defect detection and thin film parameter measurement (such as resistivity, thickness, and stress). The typical processing steps and metrology and inspection equipment used to monitor and/or control them.
Views: 953
Domain: Electronics
Category: Semiconductors
Contributing Organization: Elsevier
 ‐ More of their Presentations
Maxims of Tech: Rules of Engagement for a Fast Changing Environment
Contents:
Chapter 6: Metrology and Inspection

241

6
The Role Of Metrology
And Inspection In
Semiconductor
Processing
Mark Keefer, Rebecca Pinto, Cheri Dennison,
and James Turlo

1.0

OVERVIEW

As integrated circuits (IC) are incorporated into more and more
products, the market demand for lower cost, higher performance devices
continues to grow. In order to design and manufacture a high performance
integra ... See more

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