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Using Resonant Soft X-ray Scattering to Image Patterns on Undeveloped Resists

 Guillaume Freychet, I. Cordova, D. Kumar, T. McAfee, C. Anderson, P. Naulleau, C. Wang, Alexander He
  1st-Sep-2018
Description: Using resonant soft X-ray scattering to image patterns on undeveloped resists.
Views: 2122
Domain: Electronics
Category: Semiconductors
Contributing Organization: EUV Litho, Inc.
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Contents:
Using resonant soft X-ray scattering to
image patterns on undeveloped resists
Guillaume Freychet, I. Cordova, D. Kumar, T. McAfee, C.
Anderson, P. Naulleau, C. Wang and Alexander Hexemer
June, 14th 2018
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