LETI Strategy To Address Key MEMS Challenges

LETI Strategy To Address Key MEMS Challenges

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Description: Addressing the three key challenges identified by MEMS analysts: Innovation Technology platform Moving from device to microsystem maker: adding value and functionality with software Generic platform Not sensitive to parasitics. Well known and robust piezoresisitive detection Very short duty cycle and multiplexing. Simple electronics common for all the axis .

 
Author: Jean-Philippe Polizzi  | Visits: 355 | Page Views: 672
Domain:  High Tech Category: Semiconductors 
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Contents:
LETI STRATEGY TO ADDRESS KEY MEMS CHALLENGES
Jean-Philippe POLIZZI
MEMS Program Manager

About Leti
Founded in 1967

1,800 researchers
250 PhD students + 40 post PhD
with 37% foreign students

CEO
Dr. M-N Semeria

2800 patents
311 generated in 2014
40% under license

318 M€ budget (80% contract R&D)
~ 40M€ CapEx

54 start-ups
& 365 industrial partners

|2

MEMS MARKETS EVOLUTION

10’s
00’s
90’s
80’s
|3

MEMS: A BILLONS DOLLARS INDUSTRY

Market share forecast by application market ($ millions)
Source: Yole Developpement, 2015

$25.000M

$20.000M

$15.000M

$10.000M

$5.000M

$0M
2014
Aeronautics

2015
Automotive

2016
Consumer

2017
Defense

2018
Industrial

2019
Medical

2020
Telecom

|4

ISSUES ON CONSUMER/ IOT /
AUTOMOBILE MARKETS

Strong cost pressure

Average Selling Price erosion by
sensor function 2011-2017

Miniaturization
Growing use of Combo sensors
MEMS components
 Well established

Issues






Accelerometer
Gyroscope
Magnetometer
Microphone

 Sensor being adopted
 Pressure
 Humidity

From IHS / 2014

“Not Enough Money in MEMS”, Says
InvenSense CEO

|5

ISSUES ON CONSUMER / IOT /
AUTOMOBILE MARKETS

Strong cost pressure
Miniaturization

9-axis MEMS IMU (Bosch BMX055 – 5 dies)

Growing use of Combo sensors
MEMS components
 Well established

Issues






Accelerometer
Gyroscope
Magnetometer
Microphone

Microphone (Knowles SPA2629LR5H-B)

Pressure sensor (ST LPS25H)

 Sensor being adopted
 Pressure
 Humidity
Humidity sensor (Sensirion SHTC1)

No manufacturing standard
1 Product = 1 Process
|6

CHALLENGES IN MEMS SENSORS

INNOVATION
Disruptive solutions: Products/technologies
First product on market

"I want 500, 5,000 different types of sensors in
the next five years”
Sean Ding, chief scientific officer for
sensing solutions at telecom giant
Huawei Technologies

PRODUCT LINE
“MEMS platforms are way to go”
Reduce NRE and time to market
Ending the « one product one process » rule
Technological platforms

From Device to System
The importance of software

Stefan Finkbeiner, CEO of Bosch
Sensortec

“Not Enough Money in MEMS,
Own the Data”

Behrooz Abdi, CEO of InvenSense
|7

CHALLENGES IN MEMS SENSORS

INNOVATION
Disruptive solutions: Products/technologies
First product on market

"I want 500, 5,000 different types of sensors in
the next five years”
Sean Ding, chief scientific officer for
sensing solutions at telecom giant
Huawei Technologies

|8

30+ YEARS BACKGROUND IN MEMS SENSORS

Thin Film
Technology

(Vac.dep. / shadow mask)

Bulk
Technology

Surface
Technology

(Litho / wet etching)

Nano-scale Technology
(DUV litho on thin SOI)

(Litho / DRIE on SOI)

2010 – joint lab.

1996 - Startup
creation

2007 - Caltech
Alliance

2013 - Startup

2011 - Startup

2014
Startup

year

2005
Miniature
pressure sensor

Above-IC GMR
Technology
XXXXXX

Inertial
platform

M&NEMS
platform

2013

1996

1998

High perf.
pressure sensor

20

Accelerometer

Geophone

1996

1987
Hygrometer

10

2012

Pacemaker
accelerometer

Quartz
accelerometer

Weight sensor

1981

00

90

2011

80

1980

Transfers

Key dates

1984 - Comb drive
accelero patent

|9

A LARGE PANEL OF SENSORS TECHNOLOGIES

INERTIAL SENSOR
3-axis Accelerometer

3-axis Gyroscope

PRESSURE SENSOR
Capacitive pressure sensor

Piezoresistive pressure sensor High Temperature P sensor

ACOUSTIC SENSOR
Microphone

cMUT

pMUT

MAGNETIC SENSOR
Above-IC GMR sensor

TMR sensor and resonator

3-axis Compass
| 10

A LARGE PANEL OF SENSORS TECHNOLOGIES

BIO/CHEMICAL
SENSORS
Ionic sensor

conductivity

Multi-parameter Metabolic sensor

GAS SENSORS
NEMS-based

NDIR CO2 sensors

Photoacoustic detector

IMAGING SENSORS
IR bolometer

Cooled IR MCT PD

VIS CMOS cameras

X-rays

OTHER SENSORS
3-axis force sensor
µ-TOF Mass-spec

| 11

CHALLENGES IN MEMS SENSORS

PRODUCT LINE
“MEMS platforms are way to go”
Reduce NRE and time to market
Ending the « one product one process » rule
Technological platforms

Stefan Finkbeiner, CEO of Bosch
Sensortec

| 12

M&NEMS "GENERIC" PLATFORM
 Generic platform
 Miniaturized sensors
 Well known and robust
piezoresisitive detection

 Not sensitive to parasitics
 Very short duty cycle

MEMS size mechanical part

and multiplexing

Separate
optimization

+

 Simple electronics

Nano-size piezoresistive gauge

3-axis
Accelero
Y

3-axis
Gyroscope

common for all the axis

3-axis
Magneto

Pressure
sensor

High-SNR
Microphone

Z

X

| 13

M&NEMS 6-AXIS COMPASS/ACCELEROMETER

 6-axis mechanical
footprint ≈ 1,1mm²
 Low power consumption
(30µW/axis in DC)
 1 electronic common for
each of the 6 axis
 High linearity

| 14

NEMS-BASED SENSORS PLATFORM
FOR GAS AND BIO-SENSING

 f l4
f



  0 
Responsivity
 2eff
mM

Mass
loading

Resolution





 l3
0

High resolution
Very short response time
High integration

Mass-spec for Bio
applications

µbolometer

Cellular force
sensor

Frequency stability

Gas detection

m  2M

| 15

APIX : NEMS-BASED GAS SENSOR

Families of gases
µGC

 Volatile Organic Compounds


BTEX; Other aromatics compounds

 Permanent gases


N2, CO, CO2, H2, He etc…

 Light hydrocarbons


Industry

C1 to C5

 Heavy hydrocarbons


C6 to C12 and higher

 Roadmap for sulfur compounds


H2S, COS, THT, CS2, mercaptans etc…

Environment

Security

NEMS-based gas
chromatography
systems

 Air gas carrier
Medical

 Sensitivity up to sub ppm

LoD ≈ 100’s ppb

Typical VOC chromatogram: environment, air
quality,..
| 16

CHALLENGES IN MEMS SENORS

From Device to System
The importance of software

“Not Enough Money in MEMS,
Own the Data”

Behrooz Abdi, CEO of InvenSense
| 17

CONTEXT AWARENESS: A REALITY TODAY

FROM SENSOR FUSION….

… TO CONTEXT AWARENESS

WWW …

| 18

Sensor based Processing
LEARNING process
Learning stage
Annotated database
many users
many use cases
many trials

CLASSIFICATION process
Tune

Object ?
Scene ?
Activity ?
Events ?


DEVICE

Physical
information

Digital
information

Features

I am walking in a mall

Classifier
| 19

User Adaptive Processing
LEARNING process
Learning stage

Adapt

CLASSIFICATION process
Device
Headache ?

Physical
information

Other device

Digital
information

Features

Wellness tips …

Classifier
| 20

LETI: THE LEADING R&D INSTITUTE ON
MICROSYSTEMS


30 years experience in MEMS
• 200 people involved in MEMS
• 8” MEMS/NEMS technologies
• 330 patents portfolio in the MEMS field
• 25 on-going industrial collaborations






Addressing the three key challenges
identified by MEMS analysts:
Innovation
Technology platform
Moving from device to microsystem maker:
adding value and functionality with software
| 21

Thank you for your attention

Leti, technology research institute
Commissariat à l’énergie atomique et aux énergies alternatives
Minatec Campus | 17 rue des Martyrs | 38054 Grenoble Cedex | France
www.leti.fr

The innovation premium
6 000
Sensor by function in mobiles and tablets

Revenues in US $ Millions

5 000

4 000

Gaz
Fingerprint
Microphone
Pressure
Magnetometer
Gyroscope
Accelerometer

3 000
2 000
1 000
-

from

2 011 2 012 2 013 2 014 2 015 2 016 2 017

| 23