Automated CD-SEM operations for TD & MFG

 Alexander Starikov
  20th-May-2008
Views: 1820
Domain: Electronics
Category: Semiconductors
Maxims of Tech: Rules of Engagement for a Fast Changing Environment
Contents:
Automated CD-SEM Operation for Efficient HVM
Alexander Starikov California Technology & Manufacturing Intel Corporation Santa Clara, CA 10/24/2007

Metrology Use Models
TD/Engineering
Characterization
Low WIP Dense sampling Flexible, interactive

Manufacturing
Process control
High WIP Capable but sparse Fixed, controlled

Accelerated learning
Process evaluation Variance segmentation and reduction ... See more
...
14 May, 2008