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An Ongoing History of Strain

 Dick James
  29th-Jan-2008
Views: 5399
Domain: Electronics
Category: Semiconductors
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Contents:
The Ongoing History of Strain � Now Available with High-k!
Dick James, Senior Technology Analyst

Outline
A little history.. "Rules" of Reverse Engineering 65-nm transistors 45-nm transistors Summary

A Little History to Start..
First widespread commercial use of process-induced strain in 90-nm Intel Prescott, Jan '04
Tensile nitride for NMOS, embedded SiGe for PMOS

Then migrated in ... See more
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