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The Evolution of Si Technology Development

 Gregg S. Higashi, Ph.D.
  5th-Sep-2007
Views: 3706
Domain: Electronics
Category: Semiconductors
Contents:
Front End Products Group

Equipment Supplier's Perspective on the Evolution of Si Technology Development
Gregg S. Higashi, Ph.D. CTO & Co-Director of the Applications Development Center Front End Products Group May 2005
Applied Materials External Use

Front End Products Group

2

1998: Unit Process Physical Results

RTP'98
Applied Materials External Use

Front End Products Group

3

2003: Transi ... See more

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