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Surface Passivation for Solar Cells by Large Scale Inline Sputtering of Silicon Nitride

 W Wolke, J Catior, G Emanuel, J Liu, M Ruske, R Preu
  25th-Jul-2008
Views: 2177
Domain: Energy
Category: Photovoltaics/Solar
Contents:
PRESENTED AT THE 20 EUROPEAN PHOTOVOLTAIC SOLAR ENERGY CONFERENCE, 6-10 JUNE 2005, BARCELONA
TH

SURFACE PASSIVATION FOR SOLAR CELLS BY LARGE SCALE INLINE SPUTTERING OF SILICON
NITRIDE
W. Wolke1, J. Catoir1, G. Emanuel1, J. Liu2, M. Ruske2, R. Preu1
Fraunhofer Institute for Solar Energy Systems (ISE), Heidenhofstrasse 2, D-79110 Freiburg, Germany
2
Applied Films GmbH, Siemensstrasse 100, D-63755 A ... See more

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